Seah’s Universal Equation
نویسندگان
چکیده
2013年に発表されたSeahの「Universal Equation for Argon Gas Cluster Sputtering Yield」を紹介する．X線光電子分光法および二次イオン質量分析でおもに有機物試料のスパッタリングに用いられるガスクラスターイオンビーム（GCIB）によるスパッタ収率とスパッタイオンビームのエネルギーの関係を簡潔に示したSeahのスパッタ収率式（Seah’s universal equation）によって，金属から有機物まで様々な試料のスパッタ収率が表現できるばかりでなく，GCIBによるスパッタ過程を考察する上でも有用な知見が示されている．このSeahのスパッタ収率式以前の関連研究を踏まえた上で，Seahのスパッタ収率式が考案された過程とその応用の可能性について記述する．
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ژورنال
عنوان ژورنال: Journal of Surface Analysis
سال: 2022
ISSN: ['1347-8400', '1341-1756']
DOI: https://doi.org/10.1384/jsa.28.213